Design of silicon piezoresistive barometer with high-precisio

In view of problems of temperature drift and big discreteness of silicon piezoresistive pressure sensor which cause application of the pressure sensor to be limited, a silicon piezoresistive and digital barometer with high-precision was designed. The barometer uses surface-fitting algorithm with whole temperature range to make temperature compensation and linear processing, so as to solve problems of temperature drift and nonlinear of the silicon piezoresistive pressure sensor, and uses software to realize temperature compensation of pressure data in ATmega88PA micro-controller and sends the data to upper computer through RS485 interface. Test result shows that measuring error of the barometer is less than 0.50‰ in range of -40~+60 ℃ and the barometer meets design requirement.