Power optimization design of silicon microheater of mine-used MEMS methane sensor
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摘要: 在ANSYS有限元分析软件中对矿用微机电系统（MEMS）甲烷传感器硅微加热器功率进行了优化设计。首先建立了基于已知掺杂浓度求解一定温度范围内硅电阻率的计算模型；然后根据计算结果，利用ANSYS软件对U型双悬臂梁式硅微加热器进行了以掺杂浓度、两悬臂间距、悬臂梁宽度为影响因素的正交试验，研究了不同因素对硅微加热器功率的影响。试验结果表明：悬臂梁宽度和掺杂浓度为硅微加热器功率的主要影响因素，两悬臂间距影响较小；硅微加热器功率随悬臂梁宽度的减小而减小，随掺杂浓度的升高先增大后减小；温度为600 ℃时，选取悬臂梁宽度为25 μm、掺杂浓度为1019 cm-3、两悬臂间距为10 μm可使硅微加热器功率最优。Abstract: Power optimization design of silicon microheater of mine-used MEMS methane sensor was carried out by use of ANSYS finite element software. Firstly, a calculation model of silicon resistivity within certain temperature range was built on basis of known doping concentration. Then an orthogonal test for dule-cantilever type silicon microheater with U shape was carried out according to the calculated resistivity results in ANSYS software, which took doping concentration, distance between two cantilevers and cantilever width as influence factors, so as to research influence of different factors on power of silicon microheater. The test results show that cantilever width and doping concentration are main factors influencing the power of silicon microheater, while distance between two cantilevers has little influence. The power of silicon microheater decreases with decrease of cantilever width, and increases first then decreases with increase of doping concentration. Power of silicon microheater can achieve the optimal value when cantilever width is 25 μm, doping concentration is 1019 cm-3 and distance between two cantilevers is 10 μm at 600 ℃.
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