Product process of carrier catalytic methane detection component based on MEMS technology

Based on analysis of carrier catalyst methane detecting principle, advanced microelectro mechanical system(MEMS) technology was proposed to improve product process of traditional carrier catalytic methane detection components and the specific product process was introduced. Performance of component p produced by MEMS was tested. The results show that the carrier catalytic methane detection component based on MEMS technology has obvious improvements in size, power consumption, anti-toxic and consistency than the traditional ones.