Abstract: For design requests of low power consumption, miniaturization and low cost about methane sensor because of development of mine Internet of things, a carrier catalytic combustion type methane sensor based on mico/namo meter technology was researched. Existing research status and corresponding achievements of the methane sensor were introduced in details on inspects of microheaters and low- dimensional methane sensing, and a metal oxide semiconductor methane sensor with a new metal-insulator-metal structure was introduced. The methane sensor has characteristics of low power consumption and miniaturization, which meets with development requests of mine Internet of things.