SOI压力传感器在支架工作阻力监测中的应用

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基金项目:

国家自然科学基金青年基金项目（51304115）

“十二五”科技支撑计划项目（2012BAB13B02-02）

中国煤炭科工集团科技创新基金重点资助项目(2013ZD002)

Application of SOI pressure sensor to working resistance monitoring of hydraulic support

1.
Coal Mining and Designing Department, Tiandi Science and Technology Co., Ltd., Beijing 100013, China
2.
Mining and Design Branch, China Coal Research Institute, Beijing 100013, China
3.
State Key La

摘要: 为了提高液压支架工作阻力监测的可靠性，研制了一种新型硅基SOI压力传感器。该传感器将双层电阻栅应变计与不锈钢弹性体相熔合，控制电路采用定值定时采样模式，保证了数据的有效性和连贯性。现场应用结果表明，新型硅基SOI压力传感器监测数据准确，可用于矿井顶板压架事故分析。
- 液压支架 /
- 工作阻力监测 /
- SOI /
- 压力传感器
Abstract: In order to improve reliability of monitoring of hydraulic support working resistance, a new silicon SOI pressure sensor was developed. The sensor fuses strain meter with double-deck resistance grid and stainless steel elastomer, the control circuit uses sampling mode with constant value and time to ensure effectiveness and coherence of the data. The field application results show that the new silicon SOI pressure sensor can get accurate monitoring data and can be used to analysis of mine roof supports crushing accident.
- hydraulic support /
- working resistance monitoring /
- SOI /
- pressure sensor