基于VO<sub>2</sub>的超表面双气体传感器设计

刘海; 万寅辉; 陈聪; 高鹏; 戴耀威; 赵佳明; 王馨艳; 路祥宇; 赵思怡

doi:10.13272/j.issn.1671-251x.18041

基于VO₂的超表面双气体传感器设计

doi: 10.13272/j.issn.1671-251x.18041

中国矿业大学信息与控制工程学院, 江苏徐州　221116

基金项目: 国家自然科学基金项目（51874301）；国家重点研发计划项目（2021YFC2902702）；徐州市重点研发计划项目（KC20162）。

详细信息

作者简介:
刘海（1983—），男，湖北仙桃人，教授，博士，博士研究生导师，主要研究方向为气体检测、光电器件等，E-mail：lhai_hust@hotmail.com

中图分类号: TD679
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出版历程
- 收稿日期: 2022-10-11
- 修回日期: 2023-01-05
- 网络出版日期: 2023-01-17

Design of metasurface dual-gas sensor based on VO₂

School of Information and Control Engineering, China University of Mining and Technology, Xuzhou 221116, China

摘要

摘要: 针对传统矿用气体传感器易受温度和环境湿度等因素的影响而导致稳定性不高的问题，基于局域表面等离子共振原理和二氧化钒(VO₂)的相变特性，设计了一种基于VO₂的超表面双气体传感器。该传感器结构由上下三层组成，表面由多层金属−介电−金属(MDM)结构组成。根据VO₂的相变特点，通过改变施加的偏置电压，以电阻加热的形式加热金属板，精细控制VO₂的温度，通过改变VO₂的电导率来模拟VO₂的不同状态。当VO₂呈高温金属态时，上三层形成MDM结构， VO₂表现出金属性质，并在1 721.3 nm激发局域表面等离子体共振(LSPR)，实现甲烷检测，传感器的吸收率为94.3 %，甲烷灵敏度为4.21 nm/%。当VO₂呈低温绝缘态时，下三层形成MDM结构，在2 694.6 nm激发LSPR，实现氢气检测，传感器的吸收率为95.9 %，氢气灵敏度为2.10 nm/%。当环境折射率发生变化时，VO₂在2种状态下的吸收峰均发生了红移，且呈线性关系，可以用来检测环境折射率的变化。为验证该传感器的可行性，对6种不同体积分数的甲烷、氢气和4种不同的环境折射率进行了仿真和分析，结果表明：基于VO₂的超表面双气体传感器可有效检测出较低浓度的甲烷和氢气，且灵敏度较现有的气体传感器有较大提升；谐振峰偏移量与环境折射率变化量和甲烷体积分数变化量的计算值和理论值误差很小，说明该传感器具有很高的准确性；通过分析环境折射率和谐振波长的关系，得出该传感器对环境折射率的变化同样具有较高的检测灵敏度。
- 矿用气体传感器 /
- 超表面双气体传感器 /
- 局域表面等离子体共振 /
- 甲烷 /
- 氢气 /
- 气体灵敏度 /
- 环境折射率 /
- VO₂
Abstract: The traditional mine gas sensor is vulnerable to the influence of temperature and ambient humidity and other factors, resulting in low stability. In order to solve the above problem, based on the principle of local surface plasmon resonance (LSPR) and the phase change characteristics of vanadium dioxide (VO₂), a kind of metasurface dual-gas sensor based on VO₂ is designed. The sensor structure is composed of three layers, and the surface is composed of multi-layer metal-dielectric-metal (MDM) structure. According to the phase change characteristics of VO₂, the metal plate is heated in the form of resistance heating by changing the applied bias voltage. The temperature of VO₂ is carefully controlled, and the different states of VO₂ are simulated by changing the conductivity of VO₂. When VO₂ is in a high-temperature metal state, the upper three layers form MDM structure. VO₂ shows metal properties and excites local surface plasmon resonance (LSPR) at 1721.3 nm to realize methane detection. The sensor's absorptance reaches 94.3%, and the methane sensitivity reaches 4.21 nm/%. When VO₂ is in a low-temperature insulation state, the lower three layers form MDM structure. LSPR is excited at 2694.6 nm to realize hydrogen detection. The sensor's absorptance reaches 95.9%, and the hydrogen sensitivity reaches 2.10 nm/%. When the environmental refractive index changes, the absorption peaks of VO₂ in both states are red-shifted and linear,which can be used to detect the change of the environmental refractive index. In order to verify the feasibility of the sensor, six different concentrations of methane, hydrogen and four different environmental refractive indexes are simulated and analyzed. The results show that the metasurface dual-gas sensor based on VO₂ can effectively detect methane and hydrogen with lower concentration. The sensitivity is greatly improved compared with the existing gas sensors. The error between the calculated and theoretical values of the resonant peak shift and the environmental refractive index change and the methane volume fraction change is very small. This indicates that the sensor has high accuracy. By analyzing the relationship between the environmental refractive index and the resonant wavelength, it is concluded that the sensor also has high detection sensitivity when the environmental refractive index changes.
- mine gas sensor /
- metasurface dual-gas sensor /
- local surface plasmon resonance /
- methane /
- hydrogen /
- gas sensitivity /
- environmental refractive index /
- VO₂

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图 1 基于VO₂的超表面双气体传感器结构

Figure 1. Structure of metasurface dual-gas sensor based on VO₂

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图 2 基于VO₂的超表面双气体传感器的单元结构

Figure 2. Cell structure of metasurface dual-gas sensor based on VO₂

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图 3 基于VO₂的超表面双气体传感器在不同气体体积分数下的吸收光谱

Figure 3. Absorption spectra of metasurface dual-gas sensor based on VO₂ under different gas volume fraction

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图 4 基于VO₂的超表面双气体传感器在不同环境折射率下的吸收光谱

Figure 4. Absorption spectrum of metasurface dual-gas sensor based on VO₂ at different ambient refractive indexes

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图 5 基于VO₂的超表面双气体传感器的等效阻抗

Figure 5. The equivalent impedance of the metasurface dual-gas sensor based on VO₂

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图 6 完美吸收峰处VO₂不同相态下的表面电场

Figure 6. Surface electric field plot of VO₂ at perfect absorption peak

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图 7 LSPR谐振峰偏移量与气体体积分数的关系

Figure 7. Relation between LSPR resonant peak shift and gas volume fraction

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图 8 环境折射率与谐振波长的关系

Figure 8. The relation between ambient refractive index and resonant wavelength

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图 9 基于超表面转移法的下三层结构加工工艺流程

Figure 9. Processing technical process of lower three-layer structure based on metasurface transfer method

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图 10 矿井纤端超表面双气体传感系统

Figure 10. Fiber end metasurface dual-gas sensing system in coal mine

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表 1 参数优化结果

Table 1. Parameter optimization results

序号	$ {l}_{1}/\mathrm{n}\mathrm{m} $	$ {d}/\mathrm{n}\mathrm{m} $	$ {r}/\mathrm{n}\mathrm{m} $	灵敏度/(nm·%⁻¹)
序号	$ {l}_{1}/\mathrm{n}\mathrm{m} $	$ {d}/\mathrm{n}\mathrm{m} $	$ {r}/\mathrm{n}\mathrm{m} $	甲烷	氢气
1	90	20	100	4.16	1.00
2			120	3.09	0.95
3			140	3.34	0.71
4		40	100	2.64	0.67
5			120	2.92	1.23
6			140	2.70	0.91
7		60	100	3.71	0.67
8			120	3.25	0.87
9			140	3.24	0.90
10	100	20	100	3.6	1.00
11			120	3.43	1.80
12			140	3.71	0.90
13		40	100	3.10	1.00
14			120	4.21	2.10
15			140	3.04	0.91
16		60	100	3.04	1.00
17			120	3.05	0.95
18			140	3.05	0.90
19	110	20	100	4.32	1.01
20			120	2.22	0.75
21			140	2.91	0.90
22		40	100	3.75	0.67
23			120	2.36	1.00
24			140	3.32	0.91
25		60	100	3.19	0.66
26			120	2.78	0.75
27			140	2.93	0.71

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表 2 超表面双气体传感器与现有气体传感器的灵敏度比较

Table 2. Comparison of sensitivity of metasurface dual-gas sensor with existing gas sensors

序号	文献出处	原理类别	灵敏度/(nm·%⁻¹)
序号	文献出处	原理类别	甲烷	氢气
1	文献[22]	PCF−SPR	1.078	—
2	文献[23]	PCF−SPR	1.99	0.19
3	文献[24]	LPFG	0.375	—
4	文献[25]	LSPR	1.02	—
5	本文	LSPR	4.21	2.10

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表 3 传感器环境折射率与甲烷灵敏度的理论值与计算值比较结果

Table 3. Comparison results of theoretical value and calculated value of ambient refractive index and methane sensitivity of the metasurface dual-gas sensor based on VO₂

序号	$ {{K}}_{1{\rm{SET}}} $/ (nm·RIU⁻¹)	$ {{K}}_{2{\rm{SET}}} $/ (nm·%⁻¹)	$ {\Delta }{N} $	$ {\Delta }C $/%	${\Delta }\lambda$/nm	$ {{K}}_{1{\rm{CAL}}} $/ (nm·RIU⁻¹)	$ {{K}}_{2{\rm{CAL}}} $/ (nm·%⁻¹)
1	375	−4.21	0.01	0.5	1.65	−	−
2			0.02	0.5	5.40	375.0	−4.20
3			0.03	2.0	2.90	374.0	−4.20
4			0.04	0.5	12.95	374.6	−4.18
5			0.05	2.5	8.21	375.3	−4.22
6			0.06	2.5	11.95	374.0	−4.20

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